Inventor

KREN GEORGE

US19 patents

⚠️ This page may combine multiple inventors who share the name “KREN GEORGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KREN GEORGE

KLA TENCOR CORP

Process and assembly for non-destructive surface inspections

Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool

Process and assembly for non-destructive surface inspections

Process and assembly for non-destructive surface inspections

Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool

Process and assembly for non-destructive surface inspections

Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool

Illumination energy management in surface inspection

Illumination energy management in surface inspection

Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections

KLA TENCOR TECH CORP

Wafer inspection systems and methods for analyzing inspection data

Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool

Wafer inspection systems and methods for analyzing inspection data

Copper CMP flatness monitor using grazing incidence interferometry

TENCOR INSTRUMENTS

Position location in surface scanning using interval timing between scan marks on test wafers

KLA TENCOR TECHOLOGIES CORP

Copper CMP flatness monitor using grazing incidence interferometry

ROMANOVSKY ANATOLY

Extending the lifetime of a deep UV laser in a wafer inspection tool

TANG SHOUHONG

Method and apparatus for measuring shape or thickness information of a substrate

CHEN HAIGUANG

Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer