Inventor
SANDA ATSUO
JP5 patents
Patents
5 patentsUS5415728AMay 16, 1995
Method of performing plain etching treatment and apparatus therefor
TOSHIBA KK58 citations95
US5795399AAug 18, 1998
Semiconductor device manufacturing apparatus, method for removing reaction product, and method of suppressing deposition of reaction product
TOSHIBA KK77 citations92
US5837093ANov 17, 1998
Apparatus for performing plain etching treatment
TOSHIBA KK15 citations81
US7201851B2Apr 10, 2007
Vacuum processing apparatus and substrate transfer method
TOSHIBA KK11 citations80
US6990747B2Jan 31, 2006
Vacuum processing apparatus and substrate transfer method
TOSHIBA KK8 citations70