Inventor
PIPITONE JOHN A
US8 patents
⚠️ This page may combine multiple inventors who share the name “PIPITONE JOHN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7804040B2Sep 28, 2010
Physical vapor deposition plasma reactor with arcing suppression
APPLIED MATERIALS INC10 citations79
US7780814B2Aug 24, 2010
Wafer pre-clean reactor cable termination for selective suppression/reflection of source and bias frequency cross products
APPLIED MATERIALS INC15 citations74
US7541289B2Jun 2, 2009
Process for removing high stressed film using LF or HF bias power and capacitively coupled VHF source power with enhanced residue capture
APPLIED MATERIALS INC1 citations51
FORSTER JOHN C
2 patentsUS8920611B2Dec 30, 2014
Method for controlling radial distribution of plasma ion density and ion energy at a workpiece surface by multi-frequency RF impedance tuning
FORSTER JOHN C10 citations81
US9017533B2Apr 28, 2015
Apparatus for controlling radial distribution of plasma ion density and ion energy at a workpiece surface by multi-frequency RF impedance tuning
FORSTER JOHN C3 citations61