Inventor

MCHUGH JAMES A

US4 patents

⚠️ This page may combine multiple inventors who share the name “MCHUGH JAMES A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CLARKE ALLAN J

2 patents

US8986777B2Mar 24, 2015

Vapor sheath for liquid dispensing nozzle

CLARKE ALLAN J5 citations81

US8967074B2Mar 3, 2015

Vapor sheath for liquid dispensing nozzle

CLARKE ALLAN J7 citations81

MCHUGH JAMES A

1 patent

US8298379B2Oct 30, 2012

Method and apparatus for extending chamber component life in a substrate processing system

MCHUGH JAMES A4 citations52

GLAXOSMITHKLINE LLC

1 patent

US10357798B2Jul 23, 2019

Vapor sheath for liquid dispensing nozzle

GLAXOSMITHKLINE LLC0 citations49