Inventor
CHANG YU
TW62 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
21 patentsUS7520957B2Apr 21, 2009
Lid assembly for front end of line fabrication
APPLIED MATERIALS INC162 citations98
US7396480B2Jul 8, 2008
Method for front end of line fabrication
APPLIED MATERIALS INC285 citations98
US6423949B1Jul 23, 2002
Multi-zone resistive heater
APPLIED MATERIALS INC534 citations98
US6734020B2May 11, 2004
Valve control system for atomic layer deposition chamber
APPLIED MATERIALS INC135 citations97
US6646235B2Nov 11, 2003
Multi-zone resistive heater
APPLIED MATERIALS INC43 citations92
US6220091B1Apr 24, 2001
Liquid level pressure sensor and method
APPLIED MATERIALS INC53 citations92
US7112961B2Sep 26, 2006
Method and apparatus for dynamically measuring the thickness of an object
APPLIED MATERIALS INC18 citations91
US6199927B1Mar 13, 2001
Robot blade for handling of semiconductor substrates
APPLIED MATERIALS INC37 citations91
US6024393AFeb 15, 2000
Robot blade for handling of semiconductor substrate
APPLIED MATERIALS INC33 citations91
US7201803B2Apr 10, 2007
Valve control system for atomic layer deposition chamber
APPLIED MATERIALS INC21 citations90
US10407771B2Sep 10, 2019
Atomic layer deposition chamber with thermal lid
APPLIED MATERIALS INC12 citations81
US7355394B2Apr 8, 2008
Apparatus and method of dynamically measuring thickness of a layer of a substrate
APPLIED MATERIALS INC9 citations80
US6143084ANov 7, 2000
Apparatus and method for generating plasma
APPLIED MATERIALS INC14 citations71
US10704142B2Jul 7, 2020
Quick disconnect resistance temperature detector assembly for rotating pedestal
APPLIED MATERIALS INC2 citations70
US7777483B2Aug 17, 2010
Method and apparatus for measuring a thickness of a layer of a wafer
APPLIED MATERIALS INC3 citations61
US6618265B2Sep 9, 2003
Wiring arrangement ensuring all-or-none operation of a series of modular load elements
APPLIED MATERIALS INC2 citations59
US6500263B2Dec 31, 2002
Semiconductor substrate processing chamber having interchangeable lids actuating plural gas interlock levels
APPLIED MATERIALS INC3 citations57
US11598003B2Mar 7, 2023
Substrate processing chamber having heated showerhead assembly
APPLIED MATERIALS INC0 citations52
US7910853B2Mar 22, 2011
Direct real-time monitoring and feedback control of RF plasma output for wafer processing
APPLIED MATERIALS INC0 citations51
US10134615B2Nov 20, 2018
Substrate support with improved RF return
APPLIED MATERIALS INC0 citations50
US11495932B2Nov 8, 2022
Slip ring for use in rotatable substrate support
APPLIED MATERIALS INC0 citations49
LIU SHOW-WEN
4 patentsUS8551447B2Oct 8, 2013
Bifunctional compound with monosaccharide and N2S2 ligand, and preparation and use thereof
LIU SHOW-WEN2 citations60
US8258331B2Sep 4, 2012
Method for preparation of N-methyl-3-(2-tributylstannylphenoxy)-3-phenylpropanamine, and use therof
LIU SHOW-WEN0 citations49
US9150602B2Oct 6, 2015
Precursor used for labeling hepatorcyte receptor and containing trisaccharide and diamide demercaptide ligand, method for preparing the same, radiotracer and pharmaceutical composition of the same
LIU SHOW-WEN0 citations46
US8877943B2Nov 4, 2014
Radiotracer precursor and method for preparing the same
LIU SHOW-WEN0 citations46
CHANG YU
3 patentsUS8618446B2Dec 31, 2013
Substrate support with substrate heater and symmetric RF return
CHANG YU12 citations80
US8114256B2Feb 14, 2012
Control of arbitrary scan path of a rotating magnetron
CHANG YU6 citations77
US8721847B2May 13, 2014
Homing of arbitrary scan path of a rotating magnetron
CHANG YU4 citations66
QUARK BIOSCIENCES TAIWAN INC
3 patentsUS10415084B2Sep 17, 2019
Multiplex slide plate device and operation method thereof
QUARK BIOSCIENCES TAIWAN INC3 citations70
US11674173B2Jun 13, 2023
Operation method of multiplex slide plate device
QUARK BIOSCIENCES TAIWAN INC0 citations59
US11008610B2May 18, 2021
Multiplex slide plate device and operation method thereof
QUARK BIOSCIENCES TAIWAN INC0 citations59
RAMBUS INC
3 patentsUS9304568B2Apr 5, 2016
Changing settings for a transient period associated with a deterministic event
RAMBUS INC2 citations63
US10268252B2Apr 23, 2019
Changing settings for a transient period associated with a deterministic event
RAMBUS INC0 citations52
US9870040B2Jan 16, 2018
Changing settings for a transient period associated with a deterministic event
RAMBUS INC0 citations52
INER AEC EXECUTIVE YUAN
3 patentsUS11466002B2Oct 11, 2022
Method for preparing a non-radioactive standard β-CFT
INER AEC EXECUTIVE YUAN0 citations58
US10934314B1Mar 2, 2021
Method for preparing organoboron derivative containing oxygen and aromatic ring as labeled precursor of dopamine positron emission tomography imaging agent
INER AEC EXECUTIVE YUAN0 citations52
US9981953B1May 29, 2018
Contrast agent precursor and method for preparing the same
INER AEC EXECUTIVE YUAN0 citations49
APPLE INC
2 patentsKAO CHIEN-TEH
1 patent(unassigned)
1 patentAPPPLIED MATERIALS INC
1 patentTZU GWO-CHUAN
1 patentZENG HUA CHUN
1 patentQUARK BIOSCIENCES INC
1 patentGELATOS AVGERINOS V
1 patentINSTITUTE OF NUCLEAR ENERGY RES ATOMIC ENERGY COUNCIL EXECUTIVE YUAN
1 patentINST NUCLEAR ENERGY RES ATOMIC ENERGY COUNCIL EXECUTIVE YUAN ROC
1 patentATOMIC ENERGY COUNCIL—INST OF NUCLEAR ENERGY RES
1 patentNVIDIA CORP
1 patentShowing the top 50 of 62 patents by PatentIndex Score.