P

Inventor

CHANG YU

TW62 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

21 patents
US7520957B2Apr 21, 2009

Lid assembly for front end of line fabrication

APPLIED MATERIALS INC162 citations98
US7396480B2Jul 8, 2008

Method for front end of line fabrication

APPLIED MATERIALS INC285 citations98
US6423949B1Jul 23, 2002

Multi-zone resistive heater

APPLIED MATERIALS INC534 citations98
US6734020B2May 11, 2004

Valve control system for atomic layer deposition chamber

APPLIED MATERIALS INC135 citations97
US6646235B2Nov 11, 2003

Multi-zone resistive heater

APPLIED MATERIALS INC43 citations92
US6220091B1Apr 24, 2001

Liquid level pressure sensor and method

APPLIED MATERIALS INC53 citations92
US7112961B2Sep 26, 2006

Method and apparatus for dynamically measuring the thickness of an object

APPLIED MATERIALS INC18 citations91
US6199927B1Mar 13, 2001

Robot blade for handling of semiconductor substrates

APPLIED MATERIALS INC37 citations91
US6024393AFeb 15, 2000

Robot blade for handling of semiconductor substrate

APPLIED MATERIALS INC33 citations91
US7201803B2Apr 10, 2007

Valve control system for atomic layer deposition chamber

APPLIED MATERIALS INC21 citations90
US10407771B2Sep 10, 2019

Atomic layer deposition chamber with thermal lid

APPLIED MATERIALS INC12 citations81
US7355394B2Apr 8, 2008

Apparatus and method of dynamically measuring thickness of a layer of a substrate

APPLIED MATERIALS INC9 citations80
US6143084ANov 7, 2000

Apparatus and method for generating plasma

APPLIED MATERIALS INC14 citations71
US10704142B2Jul 7, 2020

Quick disconnect resistance temperature detector assembly for rotating pedestal

APPLIED MATERIALS INC2 citations70
US7777483B2Aug 17, 2010

Method and apparatus for measuring a thickness of a layer of a wafer

APPLIED MATERIALS INC3 citations61
US6618265B2Sep 9, 2003

Wiring arrangement ensuring all-or-none operation of a series of modular load elements

APPLIED MATERIALS INC2 citations59
US6500263B2Dec 31, 2002

Semiconductor substrate processing chamber having interchangeable lids actuating plural gas interlock levels

APPLIED MATERIALS INC3 citations57
US11598003B2Mar 7, 2023

Substrate processing chamber having heated showerhead assembly

APPLIED MATERIALS INC0 citations52
US7910853B2Mar 22, 2011

Direct real-time monitoring and feedback control of RF plasma output for wafer processing

APPLIED MATERIALS INC0 citations51
US10134615B2Nov 20, 2018

Substrate support with improved RF return

APPLIED MATERIALS INC0 citations50
US11495932B2Nov 8, 2022

Slip ring for use in rotatable substrate support

APPLIED MATERIALS INC0 citations49

LIU SHOW-WEN

4 patents

CHANG YU

3 patents

QUARK BIOSCIENCES TAIWAN INC

3 patents

RAMBUS INC

3 patents

INER AEC EXECUTIVE YUAN

3 patents

APPLE INC

2 patents

KAO CHIEN-TEH

1 patent

(unassigned)

1 patent

APPPLIED MATERIALS INC

1 patent

TZU GWO-CHUAN

1 patent

ZENG HUA CHUN

1 patent

QUARK BIOSCIENCES INC

1 patent

GELATOS AVGERINOS V

1 patent

INSTITUTE OF NUCLEAR ENERGY RES ATOMIC ENERGY COUNCIL EXECUTIVE YUAN

1 patent

INST NUCLEAR ENERGY RES ATOMIC ENERGY COUNCIL EXECUTIVE YUAN ROC

1 patent

ATOMIC ENERGY COUNCIL—INST OF NUCLEAR ENERGY RES

1 patent

NVIDIA CORP

1 patent

Showing the top 50 of 62 patents by PatentIndex Score.