Inventor

NITTALA LAKSHMINARAYANA

US5 patents

⚠️ This page may combine multiple inventors who share the name “NITTALA LAKSHMINARAYANA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MUI COLLIN K L

2 patents

US8278224B1Oct 2, 2012

Flowable oxide deposition using rapid delivery of process gases

MUI COLLIN K L396 citations94

US9064684B1Jun 23, 2015

Flowable oxide deposition using rapid delivery of process gases

MUI COLLIN K L18 citations89

DANEK MICHAL

1 patent

US8685867B1Apr 1, 2014

Premetal dielectric integration process

DANEK MICHAL55 citations96

ASHTIANI KAIHAN

1 patent

US8728958B2May 20, 2014

Gap fill integration

ASHTIANI KAIHAN26 citations91

WANG FENG

1 patent

US9257302B1Feb 9, 2016

CVD flowable gap fill

WANG FENG16 citations84