Inventor
DRAEGER NERISSA
US16 patents
⚠️ This page may combine multiple inventors who share the name “DRAEGER NERISSA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS7629227B1Dec 8, 2009
CVD flowable gap fill
NOVELLUS SYSTEMS INC78 citations98
US7144806B1Dec 5, 2006
ALD of tantalum using a hydride reducing agent
NOVELLUS SYSTEMS INC312 citations98
US7157798B1Jan 2, 2007
Selective refractory metal and nitride capping
NOVELLUS SYSTEMS INC68 citations96
US9299559B2Mar 29, 2016
Flowable oxide film with tunable wet etch rate
NOVELLUS SYSTEMS INC10 citations82
LAM RES CORP
4 patentsUS9847222B2Dec 19, 2017
Treatment for flowable dielectric deposition on substrate surfaces
LAM RES CORP15 citations83
US9627608B2Apr 18, 2017
Dielectric repair for emerging memory devices
LAM RES CORP2 citations72
US10354887B2Jul 16, 2019
Atomic layer etching of metal oxide
LAM RES CORP0 citations52
US10847375B2Nov 24, 2020
Selective atomic layer etching
LAM RES CORP0 citations33