Inventor

OPPERMANN KLAUS-GUNTER

DE2 patents

Patents

2 patents

US7692317B2Apr 6, 2010

Apparatus for housing a micromechanical structure

INFINEON TECHNOLOGIES AG8 citations82

US7300823B2Nov 27, 2007

Apparatus for housing a micromechanical structure and method for producing the same

INFINEON TECHNOLOGIES AG14 citations82