Inventor
YANG SHENG-JEN
TW2 patents
Patents
2 patentsUS9613816B2Apr 4, 2017
Advanced process control method for controlling width of spacer and dummy sidewall in semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44
US9177875B2Nov 3, 2015
Advanced process control method for controlling width of spacer and dummy sidewall in semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations44