Inventor
COTTAAR JEROEN
NL9 patents
⚠️ This page may combine multiple inventors who share the name “COTTAAR JEROEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS12031909B2Jul 9, 2024
Metrology method for measuring an exposed pattern and associated metrology apparatus
ASML NETHERLANDS BV0 citations58
US11809088B2Nov 7, 2023
Method for controlling a lithographic apparatus
ASML NETHERLANDS BV0 citations58
US11137695B2Oct 5, 2021
Method of determining a height profile, a measurement system and a computer readable medium
ASML NETHERLANDS BV1 citations58
US11366396B2Jun 21, 2022
Method and apparatus for configuring spatial dimensions of a beam during a scan
ASML NETHERLANDS BV0 citations51
US11982946B2May 14, 2024
Metrology targets
ASML NETHERLANDS BV0 citations50
US10845719B2Nov 24, 2020
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations47
US12416870B2Sep 16, 2025
Measuring method and measuring apparatus
ASML NETHERLANDS BV0 citations45
US10915033B2Feb 9, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations44