Inventor

KAGETANI RYUGO

JP3 patents

Patents

3 patents

US12211194B2Jan 28, 2025

Defect inspection with images of different synthesis ratios

HITACHI HIGH TECH CORP0 citations57

US11448663B2Sep 20, 2022

Pattern height information correction system and pattern height information correction method

HITACHI HIGH TECH CORP0 citations54

US12474166B2Nov 18, 2025

Pattern inspection/measurement device, and pattern inspection/measurement program

HITACHI HIGH TECH CORP0 citations52