Inventor

SUMNER STEPHEN

US3 patents

Patents

3 patents

US7607543B2Oct 27, 2009

Reticle pod with isolation system

ENTEGRIS INC43 citations90

US7528936B2May 5, 2009

Substrate container with pressure equalization

ENTEGRIS INC27 citations90

US10566225B2Feb 18, 2020

Substrate container with enhanced containment

ENTEGRIS INC1 citations59