Inventor · disambiguated record
Takafumi Oki
Also filed as: OKI TAKAFUMI
2 granted patents·0 citations·filing 2018–2018
22Inventor score
Files withSCREEN HOLDINGS CO LTD2
Top patents by PatentIndex Score
2 records- 0143US10444636B2Exposure device substrate processing apparatus, exposure method of substrate and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Oct 15, 2019·0 cites·15 claims
- 0238US10401736B2Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Sep 3, 2019·0 cites·16 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →