Inventor
FISCHER OLOF MARTINUS JOSEPHUS
NL7 patents
Patents
7 patentsUS9535340B2Jan 3, 2017
Support for a movable element and lithography apparatus
ASML NETHERLANDS BV2 citations70
US10437160B2Oct 8, 2019
Lorentz actuator, object positioning system, lithographic apparatus and Lorentz actuator operating method
ASML NETHERLANDS BV2 citations69
US9519230B2Dec 13, 2016
Magnetic device and lithographic apparatus
ASML NETHERLANDS BV3 citations69
US11029612B2Jun 8, 2021
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
ASML NETHERLANDS BV5 citations66
US11262663B2Mar 1, 2022
Tubular linear actuator, patterning device masking device and lithographic apparatus
ASML NETHERLANDS BV1 citations57
US9494869B2Nov 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US10955759B2Mar 23, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48