Inventor
WEON JONG-HWAN
KR3 patents
Patents
3 patentsUS6766210B2Jul 20, 2004
Process error prevention method in semiconductor fabricating equipment
SAMSUNG ELECTRONICS CO LTD21 citations86
US6090632AJul 18, 2000
Method for controlling semiconductor processing equipment in real time
SAMSUNG ELECTRONICS CO LTD22 citations85
US7225039B2May 29, 2007
Control system for semiconductor processing apparatus
SAMSUNG ELECTRONICS CO LTD7 citations65