Inventor

LEHTONEN TUOMO

FI3 patents

Patents

3 patents

US7398683B2Jul 15, 2008

Capacitive acceleration sensor

VTI TECHNOLOGIES OY36 citations86

US7516038B2Apr 7, 2009

Method for the mircomechanical measurement of acceleration and a micromechanical acceleration sensor

VTI TECHNOLOGIES OY11 citations74

US7716983B2May 18, 2010

Capacitive acceleration sensor

VTI TECHNOLOGIES OY3 citations57