Inventor

OTTERBACH RALF

DE4 patents

⚠️ This page may combine multiple inventors who share the name “OTTERBACH RALF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GLOBALFOUNDRIES INC

2 patents

US7981740B2Jul 19, 2011

Enhanced cap layer integrity in a high-K metal gate stack by using a hard mask for offset spacer patterning

GLOBALFOUNDRIES INC13 citations82

US7977179B2Jul 12, 2011

Dopant profile tuning for MOS devices by adapting a spacer width prior to implantation

GLOBALFOUNDRIES INC0 citations48

MOWRY ANTHONY

1 patent

US8507351B2Aug 13, 2013

Dopant profile tuning for MOS devices by adapting a spacer width prior to implantation

MOWRY ANTHONY0 citations47

LENSKI MARKUS

1 patent

US8987103B2Mar 24, 2015

Multi-step deposition of a spacer material for reducing void formation in a dielectric material of a contact level of a semiconductor device

LENSKI MARKUS0 citations36