Inventor
INOUE HIROMU
JP38 patents
⚠️ This page may combine multiple inventors who share the name “INOUE HIROMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
14 patentsUS10572995B2Feb 25, 2020
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC13 citations86
US11385192B2Jul 12, 2022
Inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC2 citations73
US10197507B2Feb 5, 2019
Inspection apparatus
NUFLARE TECHNOLOGY INC3 citations73
US9194817B2Nov 24, 2015
Defect detection method
NUFLARE TECHNOLOGY INC6 citations73
US9406117B2Aug 2, 2016
Inspection system and method for inspecting line width and/or positional errors of a pattern
NUFLARE TECHNOLOGY INC3 citations72
US11101103B2Aug 24, 2021
Multiple electron beam inspection apparatus and multiple electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10984978B2Apr 20, 2021
Multiple electron beam inspection apparatus and multiple electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US12579635B2Mar 17, 2026
Pattern inspection apparatus and pattern inspection method inspecting a pattern using an image corrected using offset amount based upon dark noise levels
NUFLARE TECHNOLOGY INC0 citations52
US12205272B2Jan 21, 2025
Pattern inspection device and pattern inspection method
NUFLARE TECHNOLOGY INC0 citations52
US9691143B2Jun 27, 2017
Inspection apparatus and inspection apparatus system
NUFLARE TECHNOLOGY INC1 citations52
US9645488B2May 9, 2017
Position measuring method, misplacement map generating method, and inspection system
NUFLARE TECHNOLOGY INC1 citations52
US9557277B2Jan 31, 2017
Inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC1 citations52
US9207189B2Dec 8, 2015
Sample support apparatus
NUFLARE TECHNOLOGY INC1 citations52
US9116136B2Aug 25, 2015
Inspection method and system
NUFLARE TECHNOLOGY INC0 citations42
TOSHIBA KK
12 patentsUS5574800ANov 12, 1996
Pattern defect inspection method and apparatus
TOSHIBA KK58 citations94
US6656648B2Dec 2, 2003
Pattern inspection apparatus, pattern inspection method and mask manufacturing method
TOSHIBA KK15 citations84
US6888958B1May 3, 2005
Method and apparatus for inspecting patterns
TOSHIBA KK15 citations82
US7304730B2Dec 4, 2007
Inspection apparatus having two sensors, method for inspecting an object, and a method for manufacturing a photolithography mask
TOSHIBA KK8 citations74
US7466854B2Dec 16, 2008
Size checking method and apparatus
TOSHIBA KK8 citations73
US6965687B2Nov 15, 2005
Size checking method and apparatus
TOSHIBA KK10 citations73
US7070889B2Jul 4, 2006
Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device
TOSHIBA KK6 citations72
US6849363B2Feb 1, 2005
Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device
TOSHIBA KK10 citations72
US7394048B2Jul 1, 2008
Focusing device, focusing method and a pattern inspecting apparatus
TOSHIBA KK2 citations62
US7378201B2May 27, 2008
Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device
TOSHIBA KK1 citations61
US9460502B2Oct 4, 2016
Defect inspection apparatus using images obtained by optical path adjusted
TOSHIBA KK1 citations52
US8358340B2Jan 22, 2013
Pattern inspection device and method of inspecting pattern
TOSHIBA KK0 citations40