Inventor
OGAWA RIKI
JP64 patents
⚠️ This page may combine multiple inventors who share the name “OGAWA RIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
33 patentsUS11385192B2Jul 12, 2022
Inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC2 citations73
US11004193B2May 11, 2021
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC2 citations73
US10401299B2Sep 3, 2019
Image capturing apparatus and inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC2 citations73
US10197507B2Feb 5, 2019
Inspection apparatus
NUFLARE TECHNOLOGY INC3 citations73
US10041892B2Aug 7, 2018
Charged particle beam inspection apparatus and charged particle beam inspection method
NUFLARE TECHNOLOGY INC2 citations73
US10036714B2Jul 31, 2018
Image capturing device and inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC2 citations73
US9846928B2Dec 19, 2017
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC2 citations73
US9804103B2Oct 31, 2017
Inspection method, template substrate, and focus offset method
NUFLARE TECHNOLOGY INC4 citations73
US9575010B2Feb 21, 2017
Inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC6 citations73
US9423356B2Aug 23, 2016
Illumination apparatus and inspection apparatus
NUFLARE TECHNOLOGY INC4 citations73
US9194817B2Nov 24, 2015
Defect detection method
NUFLARE TECHNOLOGY INC6 citations73
US10734190B2Aug 4, 2020
Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method
NUFLARE TECHNOLOGY INC3 citations72
US9086388B2Jul 21, 2015
Pattern evaluation method and apparatus
NUFLARE TECHNOLOGY INC2 citations63
US12265043B2Apr 1, 2025
Inspection apparatus
NUFLARE TECHNOLOGY INC0 citations62
US11101103B2Aug 24, 2021
Multiple electron beam inspection apparatus and multiple electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10984978B2Apr 20, 2021
Multiple electron beam inspection apparatus and multiple electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10984525B2Apr 20, 2021
Pattern inspection method and pattern inspection apparatus
NUFLARE TECHNOLOGY INC0 citations62
US10846846B2Nov 24, 2020
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10775326B2Sep 15, 2020
Electron beam inspection apparatus and electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10768126B2Sep 8, 2020
Multiple charged particle beam inspection apparatus and multiple charged particle beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US10712295B2Jul 14, 2020
Electron beam inspection apparatus and electron beam inspection method
NUFLARE TECHNOLOGY INC1 citations62
US8767200B2Jul 1, 2014
Luminous flux branching element and mask defect inspection apparatus
NUFLARE TECHNOLOGY INC2 citations62
US10222341B2Mar 5, 2019
Focusing apparatus, focusing method, and pattern inspection method
NUFLARE TECHNOLOGY INC1 citations59
US11189459B2Nov 30, 2021
Multibeam inspection apparatus
NUFLARE TECHNOLOGY INC0 citations52
US11004657B2May 11, 2021
Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus, and multiple electron beam irradiation method
NUFLARE TECHNOLOGY INC0 citations52
US10410335B2Sep 10, 2019
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC0 citations52
US10359370B2Jul 23, 2019
Template substrate for use in adjusting focus offset for defect detection
NUFLARE TECHNOLOGY INC0 citations52
US10007980B2Jun 26, 2018
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC0 citations52
US9683947B2Jun 20, 2017
Defect inspection device
NUFLARE TECHNOLOGY INC1 citations52
US9557277B2Jan 31, 2017
Inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC1 citations52
US9207189B2Dec 8, 2015
Sample support apparatus
NUFLARE TECHNOLOGY INC1 citations52
US9036143B2May 19, 2015
Inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC1 citations50
US9410899B2Aug 9, 2016
Illumination apparatus and pattern inspection apparatus
NUFLARE TECHNOLOGY INC1 citations48
TOSHIBA KK
10 patentsUS7345755B2Mar 18, 2008
Defect inspecting apparatus and defect inspection method
TOSHIBA KK12 citations84
US7123345B2Oct 17, 2006
Automatic focusing apparatus
TOSHIBA KK16 citations84
US7508526B2Mar 24, 2009
Defect inspecting apparatus
TOSHIBA KK7 citations74
US6909501B2Jun 21, 2005
Pattern inspection apparatus and pattern inspection method
TOSHIBA KK10 citations73
US8004655B2Aug 23, 2011
Automatic focus adjusting mechanism and optical image acquisition apparatus
TOSHIBA KK2 citations63
US7911599B2Mar 22, 2011
Reticle defect inspection apparatus and reticle defect inspection method
TOSHIBA KK5 citations63
US7894051B2Feb 22, 2011
Reticle defect inspection apparatus and reticle defect inspection method
TOSHIBA KK2 citations63
US7491959B2Feb 17, 2009
Defect inspection apparatus
TOSHIBA KK2 citations61
US7359043B2Apr 15, 2008
Pattern inspecting method and pattern inspecting apparatus
TOSHIBA KK4 citations60
US8049897B2Nov 1, 2011
Reticle defect inspection apparatus and inspection method using thereof
TOSHIBA KK0 citations52
TOPCON CORP
2 patentsADVANCED MASK INSPECTION TECH
2 patentsOGAWA RIKI
2 patentsWATANABE TOSHIYUKI
1 patentShowing the top 50 of 64 patents by PatentIndex Score.