Inventor
USHIKUBO SHIGEHIRO
JP5 patents
Patents
5 patentsUS9932674B2Apr 3, 2018
Film deposition apparatus, film deposition method, and computer-readable recording medium
KATO HITOSHI14 citations83
US9053909B2Jun 9, 2015
Activated gas injector, film deposition apparatus, and film deposition method
KATO HITOSHI20 citations83
US8642487B2Feb 4, 2014
Film deposition method and film deposition apparatus
KATO HITOSHI4 citations72
US9453280B2Sep 27, 2016
Film deposition apparatus, film deposition method and storage medium
KATO HITOSHI4 citations71
US9062373B2Jun 23, 2015
Film deposition apparatus
KATO HITOSHI2 citations61