Inventor
ISHITA RYUUU
JP4 patents
Patents
4 patentsUS9536707B2Jan 3, 2017
Etching method of multilayered film
TOKYO ELECTRON LTD3 citations68
US9337056B2May 10, 2016
Semiconductor device manufacturing method
TOKYO ELECTRON LTD4 citations68
US9263239B1Feb 16, 2016
Etching method of multilayered film
TOKYO ELECTRON LTD0 citations48
US9786512B2Oct 10, 2017
Etching method
TOKYO ELECTRON LTD0 citations34