Inventor
JEONG YOOJIN
KR3 patents
Patents
3 patentsUS12487532B2Dec 2, 2025
EUV collector inspection apparatus and inspection method
SAMSUNG ELECTRONICS CO LTD0 citations55
US11676263B2Jun 13, 2023
Extreme ultraviolet (EUV) collector inspection apparatus and method
SAMSUNG ELECTRONICS CO LTD0 citations54
US11488875B2Nov 1, 2022
Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same
SAMSUNG ELECTRONICS CO LTD0 citations49