Inventor
SHEN YING CRYSTAL
US3 patents
Patents
3 patentsUS10784077B2Sep 22, 2020
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
ASML NETHERLANDS BV5 citations81
US12494342B2Dec 9, 2025
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
ASML NETHERLANDS BV0 citations59
US11929232B2Mar 12, 2024
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
ASML NETHERLANDS BV0 citations59