Inventor
MURATORE BETH A
US3 patents
Patents
3 patentsUS5085731AFeb 4, 1992
Volatile liquid precursors for the chemical vapor deposition of copper
AIR PROD & CHEM120 citations95
US5144049ASep 1, 1992
Volatile liquid precursors for the chemical vapor deposition of copper
AIR PROD & CHEM63 citations94
US5319118AJun 7, 1994
Volatile barium precursor and use of precursor in OMCVD process
AIR PROD & CHEM17 citations72