Inventor
KAMIYAMA KINYA
JP5 patents
Patents
5 patentsUS6088520AJul 11, 2000
Method of producing highly precise charged beam drawing data divided into plurality of drawing fields
MITSUBISHI ELECTRIC CORP25 citations91
US5812412ASep 22, 1998
Charged beam pattern data generating method and a charged beam pattern data generating apparatus
MITSUBISHI ELECTRIC CORP24 citations90
US6271852B1Aug 7, 2001
boundary processing of oblique overlapping graphics to achieve dimensionally accurate electron beam irradiation
MITSUBISHI ELECTRIC CORP19 citations82
US5322764AJun 21, 1994
Method for forming a patterned resist
MITSUBISHI ELECTRIC CORP9 citations65
US5796408AAug 18, 1998
Charged particle beam drawing data production apparatus and charged particle beam drawing system
MITSUBISHI ELECTRIC CORP3 citations61