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Inventor
CHANG CHIN-HSIANG
TW
6 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHIN-HSIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patents
US10357867B2
Jul 23, 2019
Polishing system
TAIWAN SEMICONDUCTOR MFG CO LTD
8 citations
83
US9718164B2
Aug 1, 2017
Polishing system and polishing method
TAIWAN SEMICONDUCTOR MFG CO LTD
4 citations
72
US11358252B2
Jun 14, 2022
Method of using a polishing system
TAIWAN SEMICONDUCTOR MFG CO LTD
0 citations
62
MOSEL VITELIC INC
2 patents
US6336787B1
Jan 8, 2002
Method for transferring wafers in a semiconductor tape-peeling apparatus
MOSEL VITELIC INC
13 citations
71
US6117780A
Sep 12, 2000
Chemical mechanical polishing method with in-line thickness detection
MOSEL VITELIC INC
14 citations
68
UNIV CHANG GUNG
1 patent
US6966318B1
Nov 22, 2005
Filtering mask
UNIV CHANG GUNG
11 citations
65