Inventor

YATSU YUTAKA

JP2 patents

Patents

2 patents

US6416638B1Jul 9, 2002

Power supply unit for sputtering device

SHIBAURA MECHATRONICS CORP67 citations94

US6113760ASep 5, 2000

Power supply apparatus for sputtering and a sputtering apparatus using the power supply apparatus

SHIBAURA MECHATRONICS CORP23 citations84