Inventor

NOTO YOKO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “NOTO YOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US9087798B2Jul 21, 2015

Etching method

TOKYO ELECTRON LTD41 citations91

SASAKI MASARU

1 patent

US9324572B2Apr 26, 2016

Plasma etching method, method for producing semiconductor device, and plasma etching device

SASAKI MASARU6 citations70