Inventor
KANUNGO BIRAJA P
US39 patents
Patents
39 patentsUS9617188B2Apr 11, 2017
Rare-earth oxide based coating
APPLIED MATERIALS INC40 citations98
US9583369B2Feb 28, 2017
Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles
APPLIED MATERIALS INC46 citations98
US9440886B2Sep 13, 2016
Rare-earth oxide based monolithic chamber material
APPLIED MATERIALS INC48 citations98
US9212099B2Dec 15, 2015
Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
APPLIED MATERIALS INC56 citations98
US9090046B2Jul 28, 2015
Ceramic coated article and process for applying ceramic coating
APPLIED MATERIALS INC68 citations98
US9884787B2Feb 6, 2018
Rare-earth oxide based monolithic chamber material
APPLIED MATERIALS INC12 citations93
US9711334B2Jul 18, 2017
Ion assisted deposition for rare-earth oxide based thin film coatings on process rings
APPLIED MATERIALS INC16 citations93
US9850568B2Dec 26, 2017
Plasma erosion resistant rare-earth oxide based thin film coatings
APPLIED MATERIALS INC11 citations92
US9394615B2Jul 19, 2016
Plasma resistant ceramic coated conductive article
APPLIED MATERIALS INC43 citations92
US10815562B2Oct 27, 2020
Plasma erosion resistant thin film coating for high temperature application
APPLIED MATERIALS INC4 citations84
US10119188B2Nov 6, 2018
Plasma erosion resistant rare-earth oxide based thin film coatings
APPLIED MATERIALS INC8 citations84
US9976211B2May 22, 2018
Plasma erosion resistant thin film coating for high temperature application
APPLIED MATERIALS INC10 citations84
US9970095B2May 15, 2018
Ion assisted deposition top coat of rare-earth oxide
APPLIED MATERIALS INC5 citations84
US9890086B2Feb 13, 2018
Rare-earth oxide based monolithic chamber material
APPLIED MATERIALS INC7 citations84
US9869012B2Jan 16, 2018
Ion assisted deposition for rare-earth oxide based coatings
APPLIED MATERIALS INC9 citations84
US11053581B2Jul 6, 2021
Plasma erosion resistant rare-earth oxide based thin film coatings
APPLIED MATERIALS INC2 citations73
US10930526B2Feb 23, 2021
Rare-earth oxide based coatings based on ion assisted deposition
APPLIED MATERIALS INC2 citations73
US10584068B2Mar 10, 2020
Rare-earth oxide based chamber material
APPLIED MATERIALS INC2 citations73
US10577286B2Mar 3, 2020
Rare-earth oxide based chamber material
APPLIED MATERIALS INC2 citations73
US10563297B2Feb 18, 2020
Ion assisted deposition top coat of rare-earth oxide
APPLIED MATERIALS INC1 citations73
US10544500B2Jan 28, 2020
Ion assisted deposition top coat of rare-earth oxide
APPLIED MATERIALS INC3 citations73
US10501843B2Dec 10, 2019
Plasma erosion resistant rare-earth oxide based thin film coatings
APPLIED MATERIALS INC3 citations73
US10468235B2Nov 5, 2019
Plasma spray coating enhancement using plasma flame heat treatment
APPLIED MATERIALS INC2 citations73
US10364197B2Jul 30, 2019
Heat treated ceramic substrate having ceramic coating
APPLIED MATERIALS INC1 citations73
US10020170B2Jul 10, 2018
Chemistry compatible coating material for advanced device on-wafer particle performance
APPLIED MATERIALS INC3 citations73
US9916998B2Mar 13, 2018
Substrate support assembly having a plasma resistant protective layer
APPLIED MATERIALS INC2 citations73
US9869013B2Jan 16, 2018
Ion assisted deposition top coat of rare-earth oxide
APPLIED MATERIALS INC3 citations73
US9865434B2Jan 9, 2018
Rare-earth oxide based erosion resistant coatings for semiconductor application
APPLIED MATERIALS INC5 citations73
US9812341B2Nov 7, 2017
Rare-earth oxide based coatings based on ion assisted deposition
APPLIED MATERIALS INC3 citations73
US11587771B2Feb 21, 2023
Chemistry compatible coating material for advanced device on-wafer particle performance
APPLIED MATERIALS INC0 citations63
US11424136B2Aug 23, 2022
Rare-earth oxide based coatings based on ion assisted deposition
APPLIED MATERIALS INC0 citations63
US11279661B2Mar 22, 2022
Heat treated ceramic substrate having ceramic coating
APPLIED MATERIALS INC1 citations63
US10934216B2Mar 2, 2021
Rare-earth oxide based chamber material
APPLIED MATERIALS INC0 citations63
US11773479B2Oct 3, 2023
Plasma erosion resistant thin film coating for high temperature application
APPLIED MATERIALS INC0 citations62
US11680308B2Jun 20, 2023
Plasma erosion resistant rare-earth oxide based thin film coatings
APPLIED MATERIALS INC0 citations62
US10734202B2Aug 4, 2020
Rare-earth oxide based erosion resistant coatings for semiconductor application
APPLIED MATERIALS INC1 citations62
US10796888B2Oct 6, 2020
Ion assisted deposition for rare-earth oxide based thin film coatings on process rings
APPLIED MATERIALS INC0 citations52
US9624593B2Apr 18, 2017
Anodization architecture for electro-plate adhesion
APPLIED MATERIALS INC1 citations52
US9604249B2Mar 28, 2017
Innovative top-coat approach for advanced device on-wafer particle performance
APPLIED MATERIALS INC0 citations36