Inventor
KASAHARA JACK S
US3 patents
Patents
3 patentsUS6307184B1Oct 23, 2001
Thermal processing chamber for heating and cooling wafer-like objects
FSI INT INC71 citations94
US6423947B2Jul 23, 2002
Thermal processing chamber for heating and cooling wafer-like objects
FSI INT INC27 citations90
US6838115B2Jan 4, 2005
Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices
FSI INT INC10 citations71