Inventor
KOMATSU YOHKO
JP3 patents
Patents
3 patentsUS9885118B2Feb 6, 2018
Template forming method, template, and template base material
TOSHIBA MEMORY CORP2 citations71
US10118317B2Nov 6, 2018
Template and pattern formation method
TOSHIBA MEMORY CORP2 citations70
US10022748B2Jul 17, 2018
Stencil mask, stencil mask manufacturing method, and imprinting method
TOSHIBA MEMORY CORP0 citations50