P

Inventor

YOSHIKAWA RYOJI

JP10 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIKAWA RYOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

4 patents
US7602961B2Oct 13, 2009

Reference data generating method, pattern defect checking apparatus, pattern defect checking method, reference data generating program, and semiconductor device manufacturing method

TOSHIBA KK9 citations82
US7742162B2Jun 22, 2010

Mask defect inspection data generating method, mask defect inspection method and mask production method

TOSHIBA KK5 citations60
US8358340B2Jan 22, 2013

Pattern inspection device and method of inspecting pattern

TOSHIBA KK0 citations40
US9244343B2Jan 26, 2016

Pattern forming method and mask pattern data

TOSHIBA KK0 citations39

KIOXIA CORP

3 patents
US11664190B2May 30, 2023

Electron beam device and image acquisition method

KIOXIA CORP0 citations59
US11906440B2Feb 20, 2024

Inspection device and inspection method

KIOXIA CORP0 citations49
US11978195B2May 7, 2024

Inspection method and inspection apparatus

KIOXIA CORP0 citations47

TOSHIBA MEMORY CORP

2 patents
US9894271B2Feb 13, 2018

Pattern inspection apparatus and pattern inspection method

TOSHIBA MEMORY CORP1 citations51
US10976656B2Apr 13, 2021

Defect inspection device and defect inspection method

TOSHIBA MEMORY CORP0 citations49

YOSHIKAWA RYOJI

1 patent
US8811713B2Aug 19, 2014

Photomask inspection method, semiconductor device inspection method, and pattern inspection apparatus

YOSHIKAWA RYOJI3 citations54