Inventor
TADOKORO MASAHIDE
JP26 patents
⚠️ This page may combine multiple inventors who share the name “TADOKORO MASAHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
20 patentsUS12123778B2Oct 22, 2024
Thermal imaging sensor for integration into track system
TOKYO ELECTRON LTD2 citations72
US11062899B2Jul 13, 2021
Coated film removing apparatus
TOKYO ELECTRON LTD3 citations66
US7643126B2Jan 5, 2010
Method of setting focus condition at time of exposure, apparatus for setting focus condition at time of exposure, program, and computer readable recording medium
TOKYO ELECTRON LTD2 citations63
US12051587B2Jul 30, 2024
Substrate processing apparatus, estimation method of substrate processing and recording medium
TOKYO ELECTRON LTD0 citations62
US7985516B2Jul 26, 2011
Substrate processing method, computer-readable storage medium and substrate processing system
TOKYO ELECTRON LTD2 citations62
US7968260B2Jun 28, 2011
Substrate processing method, computer-readable storage medium, and substrate processing system
TOKYO ELECTRON LTD4 citations62
US7957828B2Jun 7, 2011
Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium
TOKYO ELECTRON LTD6 citations62
US7910863B2Mar 22, 2011
Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate
TOKYO ELECTRON LTD4 citations62
US7902485B2Mar 8, 2011
Temperature setting method of thermal processing plate, temperature setting apparatus of thermal processing plate, program, and computer-readable recording medium recording program thereon
TOKYO ELECTRON LTD4 citations62
US7715952B2May 11, 2010
Temperature setting of thermal processing plate using zernike coefficients
TOKYO ELECTRON LTD2 citations62
US11637031B2Apr 25, 2023
Systems and methods for spin process video analysis during substrate processing
TOKYO ELECTRON LTD0 citations61
US11474028B2Oct 18, 2022
Systems and methods for monitoring one or more characteristics of a substrate
TOKYO ELECTRON LTD0 citations61
US7420650B2Sep 2, 2008
Method of setting processing condition in photolithography process, apparatus for setting processing condition in photolithography process, program, and computer readable recording medium
TOKYO ELECTRON LTD1 citations52
US12467742B2Nov 11, 2025
Film thickness analysis method, film thickness analysis device and storage medium
TOKYO ELECTRON LTD0 citations51
US12228390B2Feb 18, 2025
Information processing apparatus, information processing method and computer-readable recording medium
TOKYO ELECTRON LTD0 citations51
US11703459B2Jul 18, 2023
System and method to calibrate a plurality of wafer inspection system (WIS) modules
TOKYO ELECTRON LTD0 citations51
US10649335B2May 12, 2020
Substrate processing apparatus, substrate processing method and storage medium
TOKYO ELECTRON LTD0 citations51
US11809091B2Nov 7, 2023
Substrate processing apparatus and processing condition adjustment method
TOKYO ELECTRON LTD0 citations50
US7867674B2Jan 11, 2011
Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program
TOKYO ELECTRON LTD0 citations41
US9899243B2Feb 20, 2018
Light irradiation apparatus
TOKYO ELECTRON LTD0 citations39
TADOKORO MASAHIDE
4 patentsUS8927906B2Jan 6, 2015
Heating device, coating/developing system, heating method, coating/developing method, and recording medium having program for executing heating method or coating/developing method
TADOKORO MASAHIDE469 citations98
US8242417B2Aug 14, 2012
Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate
TADOKORO MASAHIDE6 citations82
US8698052B2Apr 15, 2014
Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate
TADOKORO MASAHIDE2 citations60
US8308381B2Nov 13, 2012
Substrate processing method, computer-readable storage medium, and substrate processing system
TADOKORO MASAHIDE0 citations51