Inventor
SHIRAISHI GOUSUKE
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAISHI GOUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS10025190B2Jul 17, 2018
Substrate treatment system
TOKYO ELECTRON LTD2 citations71
US10459339B2Oct 29, 2019
Resist pattern forming method, coating and developing apparatus and storage medium
TOKYO ELECTRON LTD1 citations61
US8343714B2Jan 1, 2013
Resist applying and developing method, resist film processing unit, and resist applying and developing apparatus comprising the unit
TOKYO ELECTRON LTD2 citations61
US10274843B2Apr 30, 2019
Exposure apparatus, exposure method and storage medium
TOKYO ELECTRON LTD1 citations57
US10101669B2Oct 16, 2018
Exposure apparatus, resist pattern forming method, and storage medium
TOKYO ELECTRON LTD0 citations40
US9899243B2Feb 20, 2018
Light irradiation apparatus
TOKYO ELECTRON LTD0 citations39
US10527948B2Jan 7, 2020
Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium
TOKYO ELECTRON LTD0 citations38