Inventor
TOMONO MASARU
JP8 patents
Patents
8 patentsUS10025190B2Jul 17, 2018
Substrate treatment system
TOKYO ELECTRON LTD2 citations71
US10274843B2Apr 30, 2019
Exposure apparatus, exposure method and storage medium
TOKYO ELECTRON LTD1 citations57
US11256172B2Feb 22, 2022
Light irradiating device, light irradiating method and recording medium
TOKYO ELECTRON LTD0 citations48
US10101669B2Oct 16, 2018
Exposure apparatus, resist pattern forming method, and storage medium
TOKYO ELECTRON LTD0 citations40
US9899243B2Feb 20, 2018
Light irradiation apparatus
TOKYO ELECTRON LTD0 citations39
US10527948B2Jan 7, 2020
Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium
TOKYO ELECTRON LTD0 citations38
US10747121B2Aug 18, 2020
Optical processing apparatus and substrate processing apparatus
TOKYO ELECTRON LTD0 citations37
US10558125B2Feb 11, 2020
Exposure apparatus, exposure apparatus adjustment method and storage medium
TOKYO ELECTRON LTD0 citations37