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Inventor
BOW TRAVIS
US
4 patents
⚠️ This page may combine multiple inventors who share the name “BOW TRAVIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON RES CORPORATION OF AMERICA
2 patents
US10990024B2
Apr 27, 2021
Lithographic thermal distortion compensation with the use of machine learning
NIKON RES CORPORATION OF AMERICA
0 citations
51
US10444643B2
Oct 15, 2019
Lithographic thermal distortion compensation with the use of machine learning
NIKON RES CORPORATION OF AMERICA
0 citations
40
NIKON
1 patent
US8937289B2
Jan 20, 2015
High heat load optics with vibration isolated hoses in an extreme ultraviolet lithography system
NIKON
0 citations
41
NIKON CORP
1 patent
US10371920B2
Aug 6, 2019
Mirror assembly with heat transfer mechanism
NIKON CORP
0 citations
32