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Inventor
PANG HENRY KIN HENG
US
2 patents
Patents
2 patents
US10990024B2
Apr 27, 2021
Lithographic thermal distortion compensation with the use of machine learning
NIKON RES CORPORATION OF AMERICA
0 citations
51
US10444643B2
Oct 15, 2019
Lithographic thermal distortion compensation with the use of machine learning
NIKON RES CORPORATION OF AMERICA
0 citations
40