Inventor

CHANG KEH-WEN

TW4 patents

⚠️ This page may combine multiple inventors who share the name “CHANG KEH-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US7564556B2Jul 21, 2009

Method and apparatus for lens contamination control

TAIWAN SEMICONDUCTOR MFG8 citations78

US8683395B2Mar 25, 2014

Method and system for feed-forward advanced process control

TAIWAN SEMICONDUCTOR MFG1 citations47

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US11081365B2Aug 3, 2021

Treatment to interface between metal film and BARC or photoresist

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57

YU CHIH-JEN

1 patent

US8429569B2Apr 23, 2013

Method and system for feed-forward advanced process control

YU CHIH-JEN1 citations41