Inventor
BAJAJ GEETIKA
IN23 patents
Patents
23 patentsUS9991129B1Jun 5, 2018
Selective etching of amorphous silicon over epitaxial silicon
APPLIED MATERIALS INC9 citations83
US10074559B1Sep 11, 2018
Selective poreseal deposition prevention and residue removal using SAM
APPLIED MATERIALS INC5 citations72
US11540432B2Dec 27, 2022
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC1 citations70
US12322592B2Jun 3, 2025
Deposition of silicon-based dielectric films
APPLIED MATERIALS INC0 citations62
US11359282B2Jun 14, 2022
Methods for forming impurity free metal alloy films
APPLIED MATERIALS INC1 citations62
US10573527B2Feb 25, 2020
Gas-phase selective etching systems and methods
APPLIED MATERIALS INC1 citations62
US10886137B2Jan 5, 2021
Selective nitride removal
APPLIED MATERIALS INC0 citations61
US12564012B2Feb 24, 2026
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US12497692B2Dec 16, 2025
Halogen resistant coatings and methods of making and using thereof
APPLIED MATERIALS INC0 citations59
US12272607B2Apr 8, 2025
Method of enhancing contrast while imaging high aspect ratio structures in electron microscopy
APPLIED MATERIALS INC0 citations59
US12004337B2Jun 4, 2024
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US11639547B2May 2, 2023
Halogen resistant coatings and methods of making and using thereof
APPLIED MATERIALS INC0 citations59
US11547030B2Jan 3, 2023
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US10233554B2Mar 19, 2019
Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment
APPLIED MATERIALS INC1 citations59
US12588437B2Mar 24, 2026
Integrated dipole region for transistor
APPLIED MATERIALS INC0 citations58
US12590369B2Mar 31, 2026
Atomic layer deposition using novel oxygen-containing precursors
APPLIED MATERIALS INC0 citations56
US10497573B2Dec 3, 2019
Selective atomic layer etching of semiconductor materials
APPLIED MATERIALS INC0 citations51
US10177002B2Jan 8, 2019
Methods for chemical etching of silicon
APPLIED MATERIALS INC0 citations51
US11976357B2May 7, 2024
Methods for forming a protective coating on processing chamber surfaces or components
APPLIED MATERIALS INC0 citations50
US9257330B2Feb 9, 2016
Ultra-thin structure to protect copper and method of preparation
APPLIED MATERIALS INC1 citations50
US10253406B2Apr 9, 2019
Method for forming yttrium oxide on semiconductor processing equipment
APPLIED MATERIALS INC0 citations49
US12590368B2Mar 31, 2026
Method of forming interconnect structure
APPLIED MATERIALS INC0 citations48
US11390947B2Jul 19, 2022
Method of forming a fluorinated metal film
APPLIED MATERIALS INC0 citations48