Inventor
TISCHER PETER
DE3 patents
Patents
3 patentsUS4338281AJul 6, 1982
Thin film semiconductor gas sensor having an integrated heating element
SIEMENS AG60 citations90
US4176281ANov 27, 1979
Method for adjusting a semiconductor disk relative to a radiation mask in x-ray photolithography
SIEMENS AG10 citations70
US4238685ADec 9, 1980
Arrangement for the production of electronic semiconductor components
SIEMENS AG9 citations68