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Inventor
OOIWA KIYOSHI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “OOIWA KIYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
2 patents
US5310452A
May 10, 1994
Plasma process apparatus and plasma processing method
FUJITSU LTD
62 citations
94
US5160397A
Nov 3, 1992
Plasma process apparatus and plasma processing method
FUJITSU LTD
78 citations
94
FUJI ELECTRIC CO LTD
1 patent
US4891118A
Jan 2, 1990
Plasma processing apparatus
FUJI ELECTRIC CO LTD
105 citations
94