Inventor
MATSUI MIYAKO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MATSUI MIYAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
5 patentsUS10665516B2May 26, 2020
Etching method and plasma processing apparatus
HITACHI HIGH TECH CORP3 citations72
US10971369B2Apr 6, 2021
Plasma processing method and plasma processing apparatus
HITACHI HIGH TECH CORP0 citations62
US7368713B2May 6, 2008
Method and apparatus for inspecting semiconductor device
HITACHI HIGH TECH CORP6 citations60
US11462416B2Oct 4, 2022
Plasma processing method and plasma processing apparatus
HITACHI HIGH TECH CORP0 citations51
US11875978B2Jan 16, 2024
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations47
HITACHI LTD
3 patentsUS6700122B2Mar 2, 2004
Wafer inspection system and wafer inspection process using charged particle beam
HITACHI LTD88 citations97
US5981399ANov 9, 1999
Method and apparatus for fabricating semiconductor devices
HITACHI LTD114 citations97
US6753524B2Jun 22, 2004
Inspection system and inspection process for wafer with circuit using charged-particle beam
HITACHI LTD23 citations92