Inventor
KLINKHAMER JACOB FREDRIK FRISO
NL7 patents
⚠️ This page may combine multiple inventors who share the name “KLINKHAMER JACOB FREDRIK FRISO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS6955074B2Oct 18, 2005
Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV7 citations71
US11360403B2Jun 14, 2022
Bandwidth calculation system and method for determining a desired wavelength bandwidth for a measurement beam in a mark detection system
ASML NETHERLANDS BV0 citations61
US7609362B2Oct 27, 2009
Scanning lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7480028B2Jan 20, 2009
Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program
ASML NETHERLANDS BV3 citations58
US12449735B2Oct 21, 2025
Sub-field control of a lithographic process and associated apparatus
ASML NETHERLANDS BV0 citations55