Inventor
VERGAIJ-HUIZER LYDIA MARIANNA
NL6 patents
Patents
6 patentsUS10877381B2Dec 29, 2020
Methods of determining corrections for a patterning process
ASML NETHERLANDS BV1 citations70
US11782349B2Oct 10, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11592753B2Feb 28, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11327407B2May 10, 2022
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11669017B2Jun 6, 2023
Method for controlling a manufacturing apparatus and associated apparatuses
ASML NETHERLANDS BV1 citations57
US12591177B2Mar 31, 2026
Method for obtaining training data for training a model of a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations49