Inventor
CHU PINLEI EDMUND
TW8 patents
Patents
8 patentsUS12486479B2Dec 2, 2025
Semiconductor device cleaning solution, method of use, and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11773353B2Oct 3, 2023
Semiconductor device cleaning solution, method of use, and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11121028B2Sep 14, 2021
Semiconductor devices formed using multiple planarization processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11114339B2Sep 7, 2021
Method for reducing metal plug corrosion and device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10961487B2Mar 30, 2021
Semiconductor device cleaning solution, method of use, and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10510601B2Dec 17, 2019
Method for reducing metal plug corrosion and device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10157781B2Dec 18, 2018
Method for forming semiconductor structure using polishing process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10636701B2Apr 28, 2020
Methods of forming semiconductor devices using multiple planarization processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50