Inventor

CHANG JONG-YUH

TW23 patents

⚠️ This page may combine multiple inventors who share the name “CHANG JONG-YUH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANG JONG-YUH

TAIWAN SEMICONDUCTOR MFG CO LTD

Pellicle removal method

Pellicle having vent hole

Image mask film scheme and method

Method for extreme ultraviolet lithography mask treatment

Moveable and adjustable gas injectors for an etching chamber

Mask overlay control

Mask blank for scattering effect reduction

Method for extreme ultraviolet lithography mask treatment

Graphene pellicle for extreme ultraviolet lithography

Image mask film scheme and method

Mask overlay control

Systems and methods eliminating false defect detections

Extreme ultraviolet alignment marks

Extreme ultraviolet alignment marks

Moveable and adjustable gas injectors for an etching chamber

Image process method to improve mask inspection performance

ONG BIOW-HIEM

Rendered database image-to-inspection image optimization for inspection

Systems and methods eliminating false defect detections

TAIWAN SEMICONDUCTOR MFG

Image mask film scheme and method

Systems and methods for lithography masks

TU CHIH-CHIANG

Systems and methods for lithography masks

LIN CHENG-MING

Method and pellicle mounting apparatus for reducing pellicle induced distortion

LAI CHIEN-HUNG

Contamination inspection