Inventor
SHEN TRAN-HUI
TW19 patents
⚠️ This page may combine multiple inventors who share the name “SHEN TRAN-HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
15 patentsUS11307489B2Apr 19, 2022
EUV photomask and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US9953833B2Apr 24, 2018
Semiconductor mask blanks with a compatible stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US11782338B2Oct 10, 2023
EUV photomask and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11687006B2Jun 27, 2023
Method of manufacturing photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9581894B2Feb 28, 2017
Image mask film scheme and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11029593B2Jun 8, 2021
Lithography mask with a black border regions and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10866504B2Dec 15, 2020
Lithography mask with a black border region and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12235573B2Feb 25, 2025
EUV photomask and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12298673B2May 13, 2025
Method of manufacturing photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12038693B2Jul 16, 2024
Method of manufacturing photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11852966B2Dec 26, 2023
Lithography mask with a black border regions and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11327405B2May 10, 2022
Method of manufacturing photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10816892B2Oct 27, 2020
Method of manufacturing photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10678126B2Jun 9, 2020
Semiconductor mask blanks with a compatible stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10156783B2Dec 18, 2018
Image mask film scheme and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
TAIWAN SEMICONDUCTOR MFG
3 patentsUS9142423B2Sep 22, 2015
Semiconductor mask blanks with a compatible stop layer
TAIWAN SEMICONDUCTOR MFG1 citations62
US9122175B2Sep 1, 2015
Image mask film scheme and method
TAIWAN SEMICONDUCTOR MFG2 citations62
US7871742B2Jan 18, 2011
Method for controlling phase angle of a mask by post-treatment
TAIWAN SEMICONDUCTOR MFG0 citations52