Inventor

OOKAWA TETSUO

JP3 patents

Patents

3 patents

US6576552B2Jun 10, 2003

Method for polishing semiconductor device

HITACHI LTD7 citations70

US6489243B2Dec 3, 2002

Method for polishing semiconductor device

HITACHI LTD4 citations59

US6420265B1Jul 16, 2002

Method for polishing semiconductor device

HITACHI LTD2 citations59