Inventor
VAN RIET MIKE
US3 patents
Patents
3 patentsUS7570797B1Aug 4, 2009
Methods and systems for generating an inspection process for an inspection system
KLA TENCOR TECH CORP83 citations94
US7747062B2Jun 29, 2010
Methods, defect review tools, and systems for locating a defect in a defect review process
KLA TENCOR TECH CORP32 citations89
US7925072B2Apr 12, 2011
Methods for identifying array areas in dies formed on a wafer and methods for setting up such methods
KLA TENCOR TECH CORP11 citations81