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Inventor
KUSBEL JAMES
US
2 patents
⚠️ This page may combine multiple inventors who share the name “KUSBEL JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
1 patent
US7018504B1
Mar 28, 2006
Loadlock with integrated pre-clean chamber
ASM INC
22 citations
90
GRABOWSKI AL
1 patent
US9033194B1
May 19, 2015
Dispensing apparatus
GRABOWSKI AL
19 citations
79